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Piezo Scanner Product List

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50 mm aperture multi-axis piezo scanner P-517/527

50 mm aperture multi-axis piezo scanner P-517/527

Integrated structure with zero-friction flexure guide - capable of XY axis, XYZ axis, and XYθz axis motion.

The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.

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  • Actuator
  • Piezo Scanner

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P-734 XY Piezo Scanner

P-734 XY Piezo Scanner

A high dynamic system with a center opening that suppresses vibration to the limit. It achieves a linear stroke of 100 x 100 μm.

The P-734 high dynamic XY piezo nano positioning stage achieves a linear stroke of 100 x 100 μm with sub-nanometer resolution and high flatness of motion. 【Features】 ○ Ultra-precise trajectory control ideal for surface shape analysis and scanning microscopy ○ Improved responsiveness through parallel control/measurement and multi-axis precision control ○ Stroke: 100 x 100 μm, center opening of 56 x 56 mm ○ Achieves a resolution of 0.4 nm with capacitive sensors ○ Incredible long lifespan with PICMA(TM) piezo actuators ● For more details, please contact us or refer to the catalog.

  • P-734.2Cx.jpg
  • P-734.jpg
  • Actuator
  • Piezoelectric Devices
  • encoder
  • Piezo Scanner

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Optical Field Piezo Scanner with 50mm Aperture P-517/527

Optical Field Piezo Scanner with 50mm Aperture P-517/527

A multi-axis piezo scanner with zero friction that achieves nano-level positioning.

Positioning in the field of optics is a very important factor in high-precision measurement, inspection, and microfabrication. In particular, the adjustment of the position of optical components such as lenses and mirrors is a critical challenge that affects the performance of the system. Conventional mechanical positioning methods have limitations in accuracy due to friction and backlash, making high-precision positioning difficult in some cases. The P-517/527 multi-axis piezo scanner addresses these challenges in the positioning of optical components with its nano-level resolution and reproducibility. 【Application Scenarios】 - Optical inspection - Wafer inspection - Nano positioning - Measurement - Microscopy 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation with frictionless flexure guides - High linearity with capacitive sensors - Capability for transmitted light measurement with a 50 x 50 mm aperture

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【For Precision Machining】Open Aperture 50mm Piezo Scanner P-517/527

【For Precision Machining】Open Aperture 50mm Piezo Scanner P-517/527

Frictionless flexure guide integrated structure. High-performance scanner supporting precision machining at the nano level.

In the field of precision machining, further miniaturization and quality enhancement are progressing, with positioning accuracy at the nano level becoming a crucial factor that influences product performance. Particularly in laser processing and micro-patterning, even slight errors caused by vibrations and friction directly affect processing quality. The P-517/P-527 multi-axis piezo scanner adopts a frictionless flexure guide integrated structure, eliminating backlash and wear. With PICMA piezo ceramics and high-resolution capacitive sensors, it achieves nano-level reproducibility and high dynamics. Its stable high-speed response enables precise position control in micro-machining, contributing to improved processing quality and yield. 【Application Scenarios】 - Laser micro-machining equipment - Micro-patterning - Wafer processing and inspection equipment - Nano-positioning applications - Precision measurement and machining systems 【Benefits of Implementation】 - Nano-level high-precision machining control - Improved processing quality due to stable operation - Reduced processing time and increased productivity - Cost reduction through improved yield

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[For Measurement] Aperture 50mm Piezo Scanner P-517/527

[For Measurement] Aperture 50mm Piezo Scanner P-517/527

Zero-friction flexure guide integrated structure. Improved calibration accuracy with high reproducibility nano-positioning.

In the field of measurement, calibration and fine positioning require high reproducibility and stable positioning performance. Especially in measurements and alignments at the nanoscale, even slight backlash or friction can affect the reliability of the measurement results. The P-517/P-527 multi-axis piezo scanner adopts an integrated structure with frictionless flexure guides, minimizing hysteresis and mechanical play. With nanometer-level resolution and high reproducibility, it contributes to improving the accuracy of calibration work and precise measurements. Stable operating characteristics also contribute to ensuring long-term measurement reliability. 【Application Scenarios】 - Optical inspection equipment - Wafer inspection and measurement equipment - Nano-positioning applications - Precision measurement systems - Microscopes and scanning systems 【Benefits of Implementation】 - Improved calibration accuracy due to high reproducibility - Stable measurement environment due to frictionless structure - Enhanced reliability of measurement data and strengthened quality control

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[Piezoscanner P-734] Optimal XY Piezoscanner for Scanning Microscopes

[Piezoscanner P-734] Optimal XY Piezoscanner for Scanning Microscopes

Flatness of 5 nm, resolution of 0.3 nm, achieving high-speed and high-precision operation with an XY-axis piezo scanner.

In the field of microscopic observation, precise positioning of samples and control of fine movements are essential for obtaining clear images. Particularly in high-magnification observations and analysis of microstructures, nanometer-level precision is required. Even slight misalignments or vibrations in positioning can significantly impact the observation results and hinder accurate data acquisition. The P-734 addresses these challenges with high-precision positioning and high-speed operation. 【Application Scenes】 - Optical Microscopes - Scanning Microscopes - Surface Shape Analysis 【Benefits of Implementation】 - Acquisition of high-precision observation images - Accurate analysis of microstructures - Reduction of observation time For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

  • P-734.2Cx.jpg
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  • Actuator
  • Piezoelectric Devices
  • encoder
  • Piezo Scanner

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【For Laser Processing】Opening 66×66mm Multi-Axis Piezo Scanner

【For Laser Processing】Opening 66×66mm Multi-Axis Piezo Scanner

Integrated structure with zero friction flexure guide for precise control of laser beams.

In the laser processing industry, the precise positioning and control of the laser beam are crucial factors that influence processing accuracy and efficiency. Particularly in fine processing and high-speed processing, nano-level precision and high responsiveness are required. Conventional control methods have limitations in positioning accuracy and response speed, which can lead to a decline in processing quality and stagnation in productivity. The P-517/527 multi-axis piezo scanner utilizes frictionless flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nano-level reproducibility and resolution, enabling precise positioning and control of the laser beam. 【Application Scenarios】 - Laser marking - Laser cutting - Laser fine processing - Laser scanning 【Benefits of Implementation】 - Achieves high-precision laser processing - Reduces processing time - Improves yield - Accommodates diverse processing needs

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